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发明名称
摘要
申请公布号
JP2872585(B2)
申请公布日期
1999.03.17
申请号
JP19940238605
申请日期
1994.09.07
申请人
EI TEI ANDO TEI CORP
发明人
IEHYUDA SUMUUHA
分类号
H01L29/78;H01L21/8238;H01L27/02;H01L27/092;(IPC1-7):H01L29/78;H01L21/823
主分类号
H01L29/78
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代理人
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