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发明名称
OHMIC CONTACT STRUCTURE BETWEEN PLATINUM AND SILICON CARBIDE
摘要
申请公布号
EP0659298(B1)
申请公布日期
1999.03.17
申请号
EP19930921460
申请日期
1993.09.10
申请人
CREE RESEARCH, INC.
发明人
GLASS, ROBERT C.;PALMOUR, JOHN, W.;DAVIS, ROBERT, F.;PORTER, LISA, SPELLMAN
分类号
H01L29/43;H01L21/04;H01L21/28;H01L29/24;H01L29/45;(IPC1-7):H01L21/44
主分类号
H01L29/43
代理机构
代理人
主权项
地址
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