| 摘要 |
PURPOSE:To stably generate discharge under various kinds of pressure conditions of laser gas medium, and increase the laser output and the oscillation efficiency. CONSTITUTION:Microwave generated from a microwave oscillator 2 are introduced into a cylindrical cavity resonator 4 via a waveguide 3. Uniform microwave electric field of TM010 mode is generated in the axial direction of the cavity. Laser gas encapsulated in a discharge tube 1 inserted in the axial direction of the cylindrical cavity resonator 4 is excited by the electric field, thereby obtaining laser light 7. A metal cylinder 8 for preliminary ionization is inserted into the cylindrical cavity resonator 4 in parallel with the axis of the resonator. Thereby electric field intensity is increased and preliminary ionization is induced. After that, the insertion amount of the metal cylinder for preliminary ionization is adjusted and discharge is stabilized. |
