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发明名称
Semiconductor device manufacturing method
摘要
申请公布号
EP0604234(B1)
申请公布日期
1999.03.17
申请号
EP19930310507
申请日期
1993.12.23
申请人
NEC CORPORATION
发明人
TOKUYAMA, MICHIKO
分类号
H01L21/322;(IPC1-7):H01L21/308;H01L21/306;H01L21/324
主分类号
H01L21/322
代理机构
代理人
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