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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH1174340(A)
申请公布日期
1999.03.16
申请号
JP19970292792
申请日期
1997.10.24
申请人
FUJITSU LTD
发明人
TAKATSUKA HIROTAKA;OTA HIROYUKI
分类号
H01L21/76;H01L21/762;(IPC1-7):H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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