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发明名称
DRY ETCHING DEVICE
摘要
申请公布号
JPH1174254(A)
申请公布日期
1999.03.16
申请号
JP19970235203
申请日期
1997.08.29
申请人
NEC KYUSHU LTD
发明人
HAMAGUCHI TSUTOMU
分类号
C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
C23F4/00
代理机构
代理人
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