发明名称 |
Membrane and mask, and exposure apparatus using the mask, and device producing method using the mask |
摘要 |
X-ray or vacuum-ultraviolet-ray transmissive mask membrane is constituted by a laminated film. The laminated film is obtained by continuously forming a SiCN film on one of or each of sides of a SiC film. Thereby, a membrane, which is superior in physical or mechanical strength and in surface conditions and optical transmittance, is provided. Moreover, there is provided a mask using the membrane.
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申请公布号 |
US5882826(A) |
申请公布日期 |
1999.03.16 |
申请号 |
US19960680796 |
申请日期 |
1996.07.16 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
KATO, HIDEO;CHIBA, KEIKO;MAEHARA, HIROSHI |
分类号 |
G03F1/08;B32B9/00;C23C14/06;C23C16/30;G03F1/14;G03F1/16;G03F7/20;H01L21/027;(IPC1-7):G03F9/00 |
主分类号 |
G03F1/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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