Electrostatic chuck with improved spacing mask and workpiece detection device,申请号US00/079584-传众专利搜索

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发明名称	Electrostatic chuck with improved spacing mask and workpiece detection device
摘要
申请公布号	USD406852(S1)	申请公布日期	1999.03.16
申请号	US00/079584	申请日期	1997.11.14
申请人		发明人
分类号		主分类号
代理机构		代理人
主权项
地址

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