SUBSTRATE THERMAL TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To prevent a bake cover from spoiling in temperature uniformity by a method, wherein the bake cover is set higher in heat capacity at its part near the inlet/outlet of a chamber than at its part distant from the inlet/outlet. SOLUTION: A bake cover 16 is so formed as to make its part 24 near the inlet/outlet 20 of a chamber 18 larger in thickness than its part which is distant from the inlet/outlet 20 of a chamber 18. The part 24 of the bake cover 16 near the inlet/outlet 20 of the chamber 18 is set larger in heat capacity than the part of the bake cover 16 distant from the inlet/outlet 20. The bake cover 16 is formed through a manner, wherein a base is formed of stainless steel material, and the surface of the base is coated with a material such as ceramics material which is lower in thermal conductivity than that of stainless steel material. The bake cover is provided with a ceramic coating layer which is located confronting a hot plate 10.