| 摘要 |
PROBLEM TO BE SOLVED: To simplify constitution and enhance operating capability and safety by making the incident direction of electron beams symmetrical, and inclining the normal line of the symmetry plane to the incident direction of the electron beams with a specified angle. SOLUTION: An electron microscope image formed on a fluorescent screen is projected on an incident image screen of an energy filter with the use of a front lens system 41. The energy filter is arranged so that the incident direction→of electron beams draws a symmetrical orbit→to the symmetry plane 13, the normal line→of the symmetry plane 13 is inclined more than 0 deg. but less than 180 deg. to the incident direction→of the electron beams. An energy slit 40 is formed on an energy dispersion screen 15, electron beams passed through the energy slit 40 is magnified with the rear lens system 42, and an electron microscope image 43 is projected on an image detector 44. Since an image on an achromatic image screen 14 and an image on the energy dispersion screen 15 can be projected on the image detector 44, the energy filter with less aberration is obtained.
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