| 摘要 |
PROBLEM TO BE SOLVED: To obtain a vibrating gyro whose mass productivity, high accuracy and miniaturization are realized when the vibrating gyro is of a resonance type using a piezoelectric thin film. SOLUTION: A vibrating gyro is constituted of a beam part 16 in which a vibrating body is cantilevered by a support member 14 on a semiconductor substrate 12 and of a mass part 18 which is formed integrally with the beam part. A piezoelectric thin-film layer is laminated on the vibrating body. An electrode layer 28 which is formed in such a way that a driving electrode 37 and a detecting electrode 39 are laminated on the piezoelectric thin-film layer is laminated on the beam part 16. In addition, the driving electrode is divided into three segments 32 to 34, an applied voltage is changed according to their separation distances from the mass part 18, and variations in production is corrected by the applied voltage. |
