摘要 |
PROBLEM TO BE SOLVED: To obtain a binder for AlN sintered products, capable of highly enhancing the air tightness and binding strength of a bound portion by mixing YAG powder with AlN powder, calcining the mixture and subsequently crushing the calcination product into particles having particle diameters of a specific value or less. SOLUTION: This binder for AlN sintered products is obtained by mixing 100 pts.wt. of YAG (Y3 Al5 O12 ) powder having an average particle diameter of <=50 μm with 30-150 pts.wt. of AlN(aluminum nitride) powder in a solvent, drying the mixture, granulating the dried mixture, calcining the granules at a temperature of 1,500-1,850 deg.C in the atmosphere of nitrogen gas and subsequently crushing the calcined granules into particles having particle diameters of <=100 μm. The AlN sintered products are bound to each other by kneading the binder in an organic solvent, coating the obtained paste on the binding portions of the AlN sintered products, or forming the binder into a sheet-like product, disposing the sheet-like product on the binding portions of the AlN sintered products, and subsequently thermally treating the superposed AlN sintered products at a temperature exceeding 1,850 deg.C in the atmosphere of nitrogen gas. The binding of the AlN sintered products with the binder gives a volume contraction coefficient of <=10% on the sintering, a porosity of <=5% in the bound portion, and a binding strength of >=50 Mpa. |