发明名称 |
Substrate holding device and exposing apparatus using the same |
摘要 |
A substrate holding apparatus in which first and second vacuum clamping devices each have a holding surface for holding a portion of a substrate, a first driving device for rotating the first vacuum clamping device relative to the second vacuum clamping device, and a second driving device for reciprocally moving the first vacuum clamping device between a position in which it protrudes by a predetermined amount from the holding surface of the second vacuum clamping device and a position in which it does not protrude from that holding surface. Also disclosed is a substrate holding device in which a vacuum clamping device creates a vacuum clamp force on the holding surface thereof, a cylindrical delivering member surrounds at least a portion of the holding surface and is reciprocally movable between a position in which it protrudes by a predetermined amount from the holding surface and a position in which it does not protrude from the holding surface, and a driving device for moving the delivering member.
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申请公布号 |
US5883932(A) |
申请公布日期 |
1999.03.16 |
申请号 |
US19950464225 |
申请日期 |
1995.06.05 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
CHIBA, YUJI;MIZUSAWA, NOBUTOSHI;IWAMOTO, KAZUNORI;TANAKA, YUTAKA;HARA, SHINICHI;MARUMO, MITSUJI;MATSUI, SHIN;KUROSAWA, HIROSHI |
分类号 |
B23Q3/08;G03F7/20;G03F9/00;H01L21/027;H01L21/30;H01L21/683;(IPC1-7):H01J37/20 |
主分类号 |
B23Q3/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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