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发明名称
摘要
申请公布号
JP2871516(B2)
申请公布日期
1999.03.17
申请号
JP19950062252
申请日期
1995.03.22
申请人
IDOTAI TSUSHIN SENTAN GIJUTSU KENKYUSHO KK
发明人
SAKAKIBARA NOBUYOSHI
分类号
C01G1/00;C01G3/00;C23C14/08;C30B29/22;H01L39/02;H01L39/24;(IPC1-7):H01L39/02
主分类号
C01G1/00
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