发明名称 Method for the preparation of a double-coated body of boron nitride
摘要 An improvement is proposed in the preparation of, for example, a ceramic heater consisting of a substrate plate of boron nitride, a patterned layer of pyrolytic graphite (PG) on the substrate to serve as an electric resistance element and an overcoating layer of pyrolytic boron nitride (PBN) in a process comprising the steps of depositing PG on the substrate surface, pattern-wise removing the PG layer by mechanical working to form grooves and depositing PBN all over. According to the inventive improvement, which can be obtained by forming the grooves in such a fashion that the angle between the direction of a normal line to the facet surface formed by the mechanical working and the growing direction of the substrate of boron nitride is in the range from 0 DEG to 45 DEG so that the internal stress caused in the overcoating layer, which is due to the anisotropy in the thermal expansion of boron nitride, is decreased to prevent the overcoating layer from occurrence of cracks and falling during service.
申请公布号 US5882730(A) 申请公布日期 1999.03.16
申请号 US19950499345 申请日期 1995.07.07
申请人 SHIN-ETSU CHEMICAL CO., LTD. 发明人 KIMURA, NOBORU;KUROSAWA, YUKIO
分类号 H05B3/06;C04B41/52;C04B41/89;C23C16/26;C23C16/34;H01C7/02;(IPC1-7):B05D3/12 主分类号 H05B3/06
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