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发明名称
INTEGRATED CIRCUIT
摘要
申请公布号
JPH1174323(A)
申请公布日期
1999.03.16
申请号
JP19970231933
申请日期
1997.08.28
申请人
HITACHI ELECTRON ENG CO LTD
发明人
HIROZAWA MASAKAZU
分类号
G01R1/06;H01L21/66;H01L21/822;H01L27/04;(IPC1-7):H01L21/66
主分类号
G01R1/06
代理机构
代理人
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