| 摘要 |
PROBLEM TO BE SOLVED: To improve the surface polishing effect of a piezoelectric element board by applying an alternate current voltage across plane surface plates. SOLUTION: An AT cut crystal vibrator is used for a piezoelectric element board 7 and the piezoelectric element board 7 is polished by a polishing device having such a structure that respective parts are electrically insulated, with a carrier 6 interposed between a top surface plate 2 and a bottom surface plate 3. In this case, an alternate current voltage 8 of resonance frequency is applied on the AT cut crystal vibrator being the pot target. The left/right directional thickness slide vibration is thus generated on the piezoelectric element board 7 between the top surface plate 2 and the bottom surface plate 3 so that the polishing efficiency can be improved along with the original polishing of aqueous solution 1 of abrasive particulates. The alternate current voltage 8 applied across the top surface plate 2 and the bottom surface plate 3 is approximately 30 V and 1A in which the polishing work can be performed most efficiently. |
