摘要 |
PROBLEM TO BE SOLVED: To obtain a multilayered magnetic layer exhibiting single switching operation with a smooth hysteresis loop by depositing a multilayered magnetic layer of two or more layers with crystalline orientation PO[1010] with min. changes in the coercive force Hc of each magnetic layer. SOLUTION: A seed layer 12 having B2 structural material, a nonmagnetic base layer 13 such as chromium and chromium alloy, a magnetic layer 14, a spacer layer 15, a magnetic layer 16 and a coating film 17 are sequentially deposited on a substrate 11. The seed layer 12 and the base layer 13 are required to enhance PO[1010] in the magnetic layers 14, 16. The magnetic layers 14, 16 consist of a cobalt alloy containing platinum and chromium and contain additional elements such as tantalum and boron, and for example, CoPtCrTa or CoPtCrB. Thereby, the two-layer multilayered magnetic film comprising the magnetic layers 14, 16 does not exhibit a two-mode switching effect, so that irregularity in the hysteresis loop can be prevented. |