| 摘要 |
<p>The invention relates to a method of manufacturing solar cells, particularly thin film solar cells, comprising a substrate on which a structure consisting of one or more layers is provided, which method comprises the steps of: i) placing the substrate into a deposition chamber; ii) placing one or more targets into said deposition chamber for the purpose of depositing on the substrate a layer consisting of a compound of several elements, namely copper-indium-sulphur (CuInS2) or a related compound wherein indium (In) can be replaced entirely or partially for gallium (Ga); iii) generating a sub-atmospheric pressure in said deposition chamber; and iv) irradiating said target(s), using a pulsed laser, in order to form a layer of target material on said substrate, wherein as the substrate, a material which is flexible at ambient temperature and one or more targets selected from the group consisting of Cu, In, S and Ga and/or alloys thereof are used, wherein steps i) - iv) are carried out in a continuous process, wherein a strip of the substrate present on a roll is led into said deposition chamber, the strip is provided with the layer of target material in said deposition chamber, after which the substrate strip provided with the layer of target material is removed from the deposition chamber. The present invention furthermore relates to a solar cell which is manufactured in this manner.</p> |
