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经营范围
发明名称
Exposure apparatus
摘要
申请公布号
EP0422814(B1)
申请公布日期
1999.03.17
申请号
EP19900310748
申请日期
1990.10.01
申请人
CANON KABUSHIKI KAISHA
发明人
SAKAMOTO, EIJI;EBINUMA, RYUICHI;AMEMIYA, MITSUAKI;UZAWA, SHUNICHI;UDA, KOJI
分类号
G03F7/20;(IPC1-7):G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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