| 摘要 |
PROBLEM TO BE SOLVED: To obtain a sensor that has a simple configuration and superior detection sensitivity and temperature characteristics by providing a pair of electrodes for driving mounted onto the first side surface of a prism-shaped piezoelectric vibrator with first and second surfaces, one electrode for detection, a pair of electrodes for driving which are mounted onto the second side surface, and one electrode for detection. SOLUTION: An electric field is alternately applied between two electrodes for constituting an electrode for driving. At this time, the electric field direction of first and fourth pairs 5 and 14 of electrodes is opposite to that of third and sixth pairs 11 and 20 of electrodes. The electrode for driving alternately applies the electric fields with opposite directions to a vibrator 1, thus driving the vibrator 1 in a vertical direction. On the other hand, second and fifth pairs 8 and 17 of electrodes are used to detect Coriolis force. Fourth and tenth electrodes 7 and 16 are fixed to middle point reference potential on a circuit and third and ninth electrodes 6 and 15 are connected to a differential amplifier. The third and ninth electrodes 6 and 15 detect the Coriolis force being generated in the vibrator 1. |
