| 摘要 |
PROBLEM TO BE SOLVED: To provide a length measuring system which can be manufactured simply and at low costs and which is provided with a modularly assembled scale plate giving an errorless result even if a scale cycle is short and to provide a method for manufacturing the length measuring system. SOLUTION: A modular length measuring system is constituted so as to be provided with a modularly assembled scale plate in which scale carriers Ti and holders Hi have a nearly equal coefficient of thermal expansion, in which many scale carriers Ti are connected to at least one holder Hi in a state that the carriers are arranged alternatly in the long direction and which is scanned by one measuring head. In this case, the scale carriers Ti are formed to be knife-shaped together with other scale carriers Ti in their butted parts. In addition, as a method for manufacturing the modular length measuring system, the scale carriers Ti are first connected to one or more holders Hi by a first elastic connection part Ve, and the scale carriers Ti are adjusted mutually. Then, the scale carriers Ti are connected mutually to the holders Hi by a second connection part Vf whose elastic modulus is large. |
