| 摘要 |
PROBLEM TO BE SOLVED: To provide microoptical elements which may be adjusted in focus. SOLUTION: An optical substrate 12 is formed of polyimide. Plural convex lenses 10 having convex surfaces 10a are two-dimensionally arrayed and formed on one surface of this substrate 12. The rear surface of the optical substrate 12 is a flat surface and on which PZT actuators 17 comprising lower layer metallic films 13, PZT thin films 14 and upper layer metallic films 15 are formed at the points corresponding to the circumferences of the convex surfaces 10 of the convex lenses 10. When voltage is impressed between the lower layer metallic films 13 and the upper layer metallic films 15, distortion arises in the PZT thin films 14. The radius of curvature of the convex lenses 10 is changed by this distortion, by which the focal length or depth of focus of the convex lenses 10 is changed. |
