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发明名称
CHARGED PARTICLE BEAM OPTICAL SYSTEM
摘要
申请公布号
JPH1173900(A)
申请公布日期
1999.03.16
申请号
JP19970245918
申请日期
1997.08.28
申请人
NIKON CORP
发明人
NAKASUJI MAMORU
分类号
G03F7/20;H01J37/147;H01J37/153;H01J37/30;H01L21/027;(IPC1-7):H01J37/147
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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