METHOD AND DEVICE OF X-RAY MEASUREMENT

摘要

PROBLEM TO BE SOLVED: To make X-ray measurement performable with one kind of crystal monochromatic meter by selectively using one of a concentration method and a parallel beam method. SOLUTION: In the X-ray measurement method for analyzing a semple by using X-rays R, a curved crystal monochrometer is disposed in a lateral arrangement (a) in which the curve center axis X4 of a curved crystal monochrometer 18 is oriented substantially perpendicularly to an X-ray traveling path when used as a concentration optical system, and disposed in a longitudinal arrangement (b) in which the curve center axis X4 of the curve crystal monochrometer 18 is oriented substantially parallel with the X-ray traveling path when used as a parallel beam optical system. Even in the parallel beam method, the curved crystal monochrometer can be used.