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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREFOR
摘要
申请公布号
JPH1174388(A)
申请公布日期
1999.03.16
申请号
JP19980129838
申请日期
1998.05.13
申请人
MATSUSHITA ELECTRON CORP
发明人
SATO KAZUO
分类号
H01L21/8247;H01L21/822;H01L27/04;H01L27/115;H01L29/78;H01L29/788;H01L29/792;(IPC1-7):H01L21/824
主分类号
H01L21/8247
代理机构
代理人
主权项
地址
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