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发明名称
MULTILAYERED INTERCONNECTION AND MANUFACTURE THEREOF
摘要
申请公布号
JPH1174346(A)
申请公布日期
1999.03.16
申请号
JP19970231936
申请日期
1997.08.28
申请人
SONY CORP
发明人
TAGUCHI MITSURU
分类号
H01L23/522;H01L21/768;(IPC1-7):H01L21/768
主分类号
H01L23/522
代理机构
代理人
主权项
地址
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