| 摘要 |
PROBLEM TO BE SOLVED: To extend the operation life of a filter by making a housing for profile-determining a chamber and a fluid for cooling a fixing material arranged in the chamber be included. SOLUTION: In order to absorb the radiation of unnecessary wavelengths contained in a radiation 22, a filter 28 is arranged between a radiation-heating lamp 20 and the first part 24. A heat exchanger for keeping the filter 28 in a temperature range is installed. The filter 28 includes a housing 32 having a chamber 34 which is profile-determined into the first plate 36 and the second plate 38 which are parallel to each other and a fringe seal 40 arranged between the plates. The first plate 36 and the second plate 38, by absorbing the radiation of unnecessary wavelengths before the radiation 22 reaches the first part 24, filter treat part of the radiation 22. In this way, a filter-treated radiation 44 is generated. The chamber 34 receives a cooling fluid for cooling the first plate 36 and the second plate 38 and a cooling/filter treating fluid 42. |
