FORMATION OF SUB-GROUND RULE FEATURE IN MANUFACTURE OF INTEGRATED CIRCUIT,申请号JP19980180590-传众专利搜索

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发明名称	FORMATION OF SUB-GROUND RULE FEATURE IN MANUFACTURE OF INTEGRATED CIRCUIT
摘要
申请公布号	JPH1174273(A)	申请公布日期	1999.03.16
申请号	JP19980180590	申请日期	1998.06.26
申请人	SIEMENS AG	发明人	PLOESSL ROBERT
分类号	H01L21/3205;H01L21/304;H01L21/768;H01L23/52;(IPC1-7):H01L21/320	主分类号	H01L21/3205
代理机构		代理人
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