发明名称 |
Measuring uncertainty evaluation method for X-ray fluorescence thickness measurements |
摘要 |
A measuring uncertainty evaluation method uses a simulation spectrum corresponding to the fluorescence spectrum for a given measured layer thickness, with a random generator distributing random numbers to each channel of the radiation spectrum and calculation of the standard deviation in the obtained thickness measurements, for indication of the measuring uncertainty.
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申请公布号 |
DE19739321(A1) |
申请公布日期 |
1999.03.11 |
申请号 |
DE1997139321 |
申请日期 |
1997.09.09 |
申请人 |
HELMUT FISCHER GMBH & CO INSTITUT FUER ELEKTRONIK UND MESTECHNIK, 71069 SINDELFINGEN, DE |
发明人 |
FISCHER, HELMUT, 71069 SINDELFINGEN, DE |
分类号 |
G01B15/02;G01N23/223;(IPC1-7):G01B15/02 |
主分类号 |
G01B15/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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