The protection element has a substrate (1) with a first electrode layer (2) and a second electrode layer (3) above it and at a distance (d) from it defined by the thickness of a separating layer (4), with a through hole (5) forming a gas-filled hollow chamber (6) between the electrode layers. The electrodes contain an electron emitting material with very low escape energy.
申请公布号
DE19736754(A1)
申请公布日期
1999.03.11
申请号
DE1997136754
申请日期
1997.08.23
申请人
MICRONAS SEMICONDUCTOR HOLDING AG, ZUERICH, CH
发明人
IGEL, GUENTER, 79331 TENINGEN, DE;KRUMREY, JOACHIM, 79106 FREIBURG, DE