发明名称 Multi-mode gas system control method
摘要 The method includes the steps of determining a flow load of a predetermined gas flow contained in the gas system, and selecting a corresponding operation mode in response to the determined flow load. A control parameter corresponding to the selected control operation mode is read from a data table, and a gas heating arrangement for heating the gas flow is controlled in response to the selected control parameter. The method includes the step of determining a corresponding control operation mode according to a presence of a predetermined gas flow which is contained in the gas system. A control parameter to be used for each control operation mode is stored beforehand in a data table. A flow load of the predetermined gas flow is determined, and a corresponding control operation mode is selected in response to the determined flow load. The control parameter corresponding to the selected control operation mode is read from the data table, and a gas heating arrangement for heating the gas flow is controlled in response to the selected control parameter.
申请公布号 DE19836331(A1) 申请公布日期 1999.03.11
申请号 DE19981036331 申请日期 1998.08.11
申请人 TOKYO ELECTRON LTD., TOKIO/TOKYO, JP 发明人 KOMINO, MITSUAKI, TOKIO/TOKYO, JP;UCHISAWA, OSAMU, SENDAI, MIYAGI, JP;CHIBA, YASUHIRO, SENDAI, MIYAGI, JP
分类号 C23C16/455;C23C16/52;H01L21/00;(IPC1-7):G05D21/00;G05D27/00;H01L21/306 主分类号 C23C16/455
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