发明名称 A process for the analysis of gas-solid interactions and heterogeneous chemical reactions
摘要 The kinetic characteristics of heterogeneous chemical reactions, particularly of metal deposition on a solid substrate, is determined by light irradiation and measurement of photo-emission currents.- DETAILED DESCRIPTION - The solid substrate is submitted to light radiation of a suitable intensity and the photo-emission current is measured and its variation in time. The surface is then subjected to a reactive species , and from the variation in current intensity the kinetic characteristics of the gas-solid interaction at the surface can be determined. An INDEPENDENT CLAIM is also included for the installation required to effect the process (figure 1).TF - TECHNOLOGY FOCUS - INORGANIC CHEMISTRY - Preferred Process: The preferred interaction is between gallium arsenide, GaAs, as substrate, and an organometallic Ga species such as triethyl- or trimethyl gallium. The partial pressure is such that the surface is saturated with the reactive species. The variation of the current at different substrate temperatures is measured
申请公布号 FR2768226(A1) 申请公布日期 1999.03.12
申请号 FR19970011313 申请日期 1997.09.11
申请人 INSTITUT NATIONAL POLYTECHNIQUE DE TOULOUSE INPT 发明人 MAURY FRANCIS;VIGUIER NICOLAS;GUE ANNE MARIE;ESTEVE DANIEL
分类号 G01N23/227;(IPC1-7):G01N27/12;G01N21/75 主分类号 G01N23/227
代理机构 代理人
主权项
地址