| 摘要 |
<p>A laser device dices a substrate by generating a continuous wave-oscillation laser beam 3 that is converged by a lens 4 and focused at a predetermined focus O between the surface of the substrate 1 and a tip of a nozzle of a guide 5. Then, the focus is expanded to result in a laser beam 3a having a beam spot diameter of S at the surface of the substrate 1. A flow of assist gas G0, G1, G2 having a predetermined constant pressure is supplied from a gas intake 6 surrounding the laser beam 3. As the laser beam 3a is defocused, the beam spot diameter S is expanded and its energy distribution is moderated. The gas is blown onto the substrate 1 at constant pressure in order to suppress generation of strains due to thermal deformation.</p> |
