Method and apparatus for plating a substrate

摘要

A high quality metallic deposit can be produced inside the micro-cavities formed on a surface of a substrate by the present invention. The method comprises immersing the substrate in a liquid held in a processing chamber; evacuating the processing chamber so as to remove residual bubbles from the micro-cavities and to degas the liquid within the micro-cavities; and subjecting the liquid to boiling in at least those regions adjacent to the substrate. <IMAGE>