摘要 |
The present invention relates generally to new structures for a field emission c athode and processes for fabricating the same. The field emission is made of any material that is capable of emitting ele ctrons under the influence of an electrical potential. A process for making one embodiment of the invention includes the ste ps of forming a hole (15) in a substrate (5), depositing a first material (20) in said hole to form a cusp (21), depositing an electron e mitting material (30) to fill at least partly said cusp and removing the first material to expose a portion (31) of the electron emittin g material. The field emission cathode has several unique three dimensional structures. The basic structure comprises a layer of ma terial with cathode tips. For a more complex structure the cathode tip is preferably accurately aligned inside an extraction/ control electrode structure, in preferably a vacuum environment. The structures of this invention can be fabricated to be connected to other similar field emission cathodes or to other electronic devices.
|