发明名称 STRUCTURES AND PROCESSES FOR FABRICATING FIELD EMISSION CATHODES
摘要 The present invention relates generally to new structures for a field emission c athode and processes for fabricating the same. The field emission is made of any material that is capable of emitting ele ctrons under the influence of an electrical potential. A process for making one embodiment of the invention includes the ste ps of forming a hole (15) in a substrate (5), depositing a first material (20) in said hole to form a cusp (21), depositing an electron e mitting material (30) to fill at least partly said cusp and removing the first material to expose a portion (31) of the electron emittin g material. The field emission cathode has several unique three dimensional structures. The basic structure comprises a layer of ma terial with cathode tips. For a more complex structure the cathode tip is preferably accurately aligned inside an extraction/ control electrode structure, in preferably a vacuum environment. The structures of this invention can be fabricated to be connected to other similar field emission cathodes or to other electronic devices.
申请公布号 CA2085982(C) 申请公布日期 1999.03.09
申请号 CA19902085982 申请日期 1990.10.17
申请人 发明人
分类号 H01J1/304;H01J1/30;H01J9/02;(IPC1-7):H01J9/12 主分类号 H01J1/304
代理机构 代理人
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