CARRYING DEVICE FOR BOARD HOLDING VESSEL AND BOARD PROCESSING EQUIPMENT HAVING THE SAME

摘要

PROBLEM TO BE SOLVED: To enable handling of board-holding devices of different kinds. SOLUTION: This carrying device is equipped with a type which detects a sensor 21 for detecting the type of a board-holding vessel and a size-detecting sensor 22 for detecting the size of the board-holding vessel. In the case that the board-holding vessel is an integral-type cassette 90 herein, the integral type cassette 90 is supported by a rotating mechanism part 30, vertical positions of a door opening-closing mechanism part 70 and a door 92 of the integral-type cassette 90 are regulated according to the size of the cassette, the door 92 is removed and the integral type cassette 90 is moved to a board supply position. In the case that the board-holding vessel is an open-type cassette, it is supported by the rotating mechanism part 30 at the board supply position.