| 摘要 |
PROBLEM TO BE SOLVED: To transmit a large amount of data, accurately in wide area even in the noisy area at a high speed of a control device for controlling a semiconductor manufacturing apparatus by improving a semiconductor device manufacturing apparatus control system employing a discrete type remote I/O system. SOLUTION: This system is provided with a main control unit 11 for transmitting or receiving various data to or from each control device among a plurality of control devices, in relation to the operations of a semiconductor device manufacturing apparatus and a plurality of node units 12, 12a-12d which are connected to the data transmission path and includes one or more functions. Each of the plurality of control devices is connected to the corresponding node unit, the transmission path is connected to the optical hub units 13a to 13c, and this optical hub unit is connected to the main control unit via optical transmission paths 14, 15, 15a. |
