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发明名称
PLASMA MEASUREMENT PROBE
摘要
申请公布号
JPH1167489(A)
申请公布日期
1999.03.09
申请号
JP19970217524
申请日期
1997.08.12
申请人
KOKUSAI ELECTRIC CO LTD
发明人
TAKEBAYASHI MOTONARI
分类号
H05H1/00;(IPC1-7):H05H1/00
主分类号
H05H1/00
代理机构
代理人
主权项
地址
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