| 摘要 |
PROBLEM TO BE SOLVED: To permit an efficient and readily manufacture of a semiconductor material without containing elements having toxicity, which can be comparatively readily supplied and has no limitation in supply amount, by supplying a solution containing tin dichloride and thiounea of a specific concentration to a substrate which has been heated to a temperature within a specific range. SOLUTION: A solution containing tin dichloride of 0.001-0.12 M and thiourea at a molar ratio of 0.1-10 times the tin dichloride is supplied to a substrate 4 which has been heated to 175-425 deg.C. An atomizer 3, which has a structure of two-fluid-type spray gun, atomizes the solution provided from a solution supply portion 1 by means of a compressed air from a carrier gas supply portion 2 so as to spray the atomized solution 15 to the substrate 4 which has been heated to a predetermined temperature by a heater 5, thereby forming a stannous sulfide film 16. On the other hand, a sheath-type thermocouple is arranged at a side surface of the substrate 4 to control the heater 5 by a PID controller so that the temperature at the central portion of the surface of the substrate 4 is settled in a predetermined range of value. |
