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发明名称
CIRCUIT PLATE
摘要
申请公布号
JPH1167818(A)
申请公布日期
1999.03.09
申请号
JP19970228231
申请日期
1997.08.25
申请人
HITACHI CHEM CO LTD
发明人
WATANABE ITSUO;TAKEMURA KENZO;NAGAI AKIRA;ISAKA KAZUHIRO;WATANABE OSAMU;KOJIMA KAZUYOSHI
分类号
H01L21/60;(IPC1-7):H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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