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发明名称
MICROWAVE ION SOURCE
摘要
申请公布号
JPH1167115(A)
申请公布日期
1999.03.09
申请号
JP19970237680
申请日期
1997.08.18
申请人
NISSIN ELECTRIC CO LTD
发明人
INAI YUTAKA;OKUDA SHOHEI
分类号
H01J27/18;H01J37/08;(IPC1-7):H01J27/18
主分类号
H01J27/18
代理机构
代理人
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