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发明名称
SEMICONDUCTOR EQUIPMENT
摘要
申请公布号
JPH1168546(A)
申请公布日期
1999.03.09
申请号
JP19970226167
申请日期
1997.08.22
申请人
NEC CORP
发明人
TOKI KAZUHISA;OCHI MASATOSHI
分类号
H01L21/8238;H01L27/092;H03K19/0175;(IPC1-7):H03K19/017;H01L21/823
主分类号
H01L21/8238
代理机构
代理人
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