DEVICE AND METHOD FOR POSITIONING OBJECT IN A PLURALITY OF POSITIONS INSIDE ENCLOSURE

摘要

PROBLEM TO BE SOLVED: To eliminate large interface from vacuum to the open air by arranging an operation actuator completely inside an enclosure. SOLUTION: An index device 10 has a movable positioning member 50 fixed to an operation actuator 60. Both the operation actuator 60 and the positioning member 50 are arranged inside an enclosure 20. A linear motor 70 which has a fixer and a reaction plate suitably is used in the operation actuator 60 for realizing easy arrangement of the operation actuator 60 inside the enclosure 20. Thereby, it is possible to eliminate bulky shaft arrangement, to reduce a size which is necessary for the enclosure 20 and to accurately position a cassette with good reproducibility. Arrangement inside the enclosure 20 makes it possible to eliminate large interface from vacuum to the open air and to eliminate leak from interface.