| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for protrusions having fine apertures by which fine apertures are formed in a good reproducibility, are easily integrated on a substrate, are small in variation of the diameters of apertures when plural fine apertures are formed and have high productivity because of the formation thereof by a batch process, and the protrusions having fine apertures and a probe or multiprobes therewith. SOLUTION: The manufacturing method for the protrusions having the fine apertures or the protrusions having fine apertures is executed or are constituted by providing a first substrate 1, on which recessed parts 3 having an acute shape at the tips are formed on the surf ace, depositing a light shielding material on areas except for the tips of the recessed parts 3 formed on the first substrate 1, thereby forming the protrusions consisting of a light shielding layer 5 having the fine apertures 6 at the tips and transferring the protrusions to a second substrate 8. Further, the probe or the multiprobes are constituted thereof. |
