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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH1167944(A)
申请公布日期
1999.03.09
申请号
JP19970226649
申请日期
1997.08.22
申请人
NEC CORP
发明人
YOSHIDA HIROSHI
分类号
H01L21/76;H01L21/8249;H01L27/06;(IPC1-7):H01L21/824
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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