| 摘要 |
PROBLEM TO BE SOLVED: To control the converging and dispersing situation determined by applied high frequency voltage, the resonance frequency, ion proceeding speed, etc., and control the accelerating energy in a high frequency quadrupole accelerator which can converge and accelerate ion beam group of high electric current without dispersing ion beam and at the same time which can converge ion beam group in the beam proceeding axial direction. SOLUTION: Circular electrodes 19, 20 to be connected with vertical electrodes 15, 16 and a horizontal electrode 17 are installed in the rear end parts of these electrodes in the manner that the high frequency phaseϕs1 at the center point P6 of between the electrodes 19, 20 and the high frequency phaseϕs2 of the center point P8 between the circular electrode 20 and the earthing electrode face 14 of a vacuum container 13 are made to be a proper and desired values. Consequently, without being accelerated, ion beam group can be converged in the beam proceeding axial direction by controlling the high frequency phaseϕs0 of, for example, electrodes 15-17 to be 0 deg. andϕs1=ϕs2=-90 deg..
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