| 摘要 |
PROBLEM TO BE SOLVED: To offer detailed information on hindrances, such as the point of occurrence, contents, etc., also to a remote operator. SOLUTION: In a voice information storing means 20-22 voice output data and identifiers of voice composite pattern making correspondence to specified codes are previously stored. Then in a voice synthesizing pattern storing means 23 the voice-outputting order of voice output data and parameters, in correspondence with the identifiers of the corresponding voice synthetic pattern are stored. This voice output data is the data related to the words expressing the operation conditions and the parameters are the data relating to the content of announcement such as the points, where hindrances have occurred, and the data of announced subjects. By synthesizing them according to the voice compositing pattern (namely the order of voice output), the voice data which expresses a certain content of announcement with a series of words is synthesized. Thus, the operating conditions such as the situations of processing operations, and hindrance occurrence in a substrate processing device are outputted by voices. |
