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发明名称
MASS FLOW CONTROLLER
摘要
申请公布号
JPH1165671(A)
申请公布日期
1999.03.09
申请号
JP19970225416
申请日期
1997.08.21
申请人
HITACHI METALS LTD
发明人
TANAKA MAKOTO;TOKUHISA TAIICHI
分类号
F16K7/16;F16K31/02;G05D7/06;(IPC1-7):G05D7/06
主分类号
F16K7/16
代理机构
代理人
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