| 摘要 |
PROBLEM TO BE SOLVED: To enable concurrent observation through both an electron microscope and a scanning tunneling microscope by connecting an ultra-high vacuum chamber to which the electron microscope is connected, and an ultra-high vacuum chamber to which the scanning tunneling microscope is connected, and an ultra-high vacuum chamber to/from which a sample can be carried in and carried out, to each other so that they can be cleaned separately. SOLUTION: An STM chamber 1 provided with a STM holder 2 housing a scanning tunneling microscope(STM) is connected to an ultra-high vacuum electron microscope chamber 9 provided with an observation stage 3 via a valve 7, and a sample treatment chamber 5 provided with a sample holder 4 is connected to the chamber 9 via a valve 10. The STM chamber 1 is provided with a transfer rod TR1, and after forming an ultra-high vacuum condition in the chamber 1, the valve 7 is passed through the chamber 1 so as to have the STM holder 2 move into the chamber 9. The sample processing chamber 5 is provided with a transfer rod TR2, and after forming the ultra-high vacuum condition in the chamber 5, the valve 10 is passed through the chamber 5 so as to have the sample holder 4 move into the chamber 9. |
